The CS200 MFC is a digital product that provides high accuracy and high reliability in controlling and measuring gas mass flow.
The specification are as follows: Accuracy: ±1.0%s.p.（≥35%F.S.）, ±0.35%F.S.（<35%F.S.）; Linearity: ±0.5%F.S.; Response Time: ≤0.8sec.
An ODVA Declaration of Conformity has been issued for the product(s) described on this page.
This Declaration confirms that the product(s) passed conformance and related testing at an ODVA vendor-independent Test Service Provider.
Download the Declaration of Conformity
DOC Number: 10616 Year: 2010 |
Download the EDS File
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| Explicit Peer-to-Peer | |
| I/O Peer-to-Peer |
| Quick Connect | |
| Master Scanner | |
| Faulted Node Recovery | |
| Configuration Consistency Value |
| 125K | |
| 250K | |
| 500K |
| Bit Strobe | |
| Polling | |
| Cyclic | |
| Change of State |
| Hardware Switches | |
| EDS | |
| Parameter Object | |
| Custom Software |
| Vendor Specific | |
| Safety Discrete I/O |
| DeviceNet | ID: 1093 |
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