The CS200 MFC is a digital product that provides high accuracy and high reliability in controlling and measuring gas mass flow.
The specification are as follows: Accuracy: ±1.0%s.p.（≥35%F.S.）, ±0.35%F.S.（<35%F.S.）; Linearity: ±0.5%F.S.; Response Time: ≤0.8sec.
An ODVA Declaration of Conformity has been issued for the product(s) described on this page.
This Declaration confirms that the product(s) passed conformance and related testing at an ODVA vendor-independent Test Service Provider.
Download the Declaration of Conformity
DOC Number: 10616 Year: 2010
|Download the EDS File|
|Faulted Node Recovery|
|Configuration Consistency Value|
|Change of State|
|Safety Discrete I/O|