GP200 Series is the first fully pressure-insensitive pressure-based mass flow controller (P-MFC) designed specifically for advanced Etch and Deposition processes in semiconductor manufacturing.
An ODVA Declaration of Conformity has been issued for the product(s) described on this page.
This Declaration confirms that the product(s) passed conformance and related testing at an ODVA vendor-independent Test Service Provider.
Download the Declaration of Conformity
DOC Number: 11857 Year: 2019 |
Download the EDS File
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| Explicit Peer-to-Peer | |
| I/O Peer-to-Peer |
| Quick Connect | |
| Master Scanner | |
| Faulted Node Recovery | |
| Configuration Consistency Value |
| 125K | |
| 250K | |
| 500K |
| Bit Strobe | |
| Polling | |
| Cyclic | |
| Change of State |
| Hardware Switches | |
| EDS | |
| Parameter Object | |
| Custom Software |
| Vendor Specific | |
| Safety Discrete I/O |
| EtherNet/IP | ID: 246 |
| DeviceNet | ID: 246 |
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