$ EZ-EDS Version 3.0 Generated Electronic Data Sheet [File] DescText = "HORIBA STEC Digital Mass Flow Controller EDS File"; CreateDate = 12-12-2011; CreateTime = 10:03:28; ModDate = 12-12-2011; ModTime = 10:03:30; Revision = 1.0; [Device] VendCode = 162; VendName = "HORIBA/STEC INC."; ProdType = 26; $ (0x1A) ProdTypeStr = "Mass Flow Controller"; $ Mass Flow Controller ProdCode = 1000; MajRev = 1; MinRev = 2; ProdName = "LF-F004M-A"; Catalog = "XXXX"; [IO_Info] Default = 0x0001; PollInfo = 0x0001, 2, 1; Input1 = 2, 0, 0x0001, "Flow", 6, "20 04 24 01 30 03", ""; Input2 = 3, 0, 0x0001, "Status,Flow", 6, "20 04 24 02 30 03", "HORIBA STEC's Default Input"; Input3 = 5, 0, 0x0001, "Status,Flow and Valve", 6, "20 04 24 03 30 03", ""; Input4 = 5, 0, 0x0001, "Status, Flow and Setpoint", 6, "20 04 24 04 30 03", ""; Input5 = 7, 0, 0x0001, "Status, Flow, Setpoint and Valve", 6, "20 04 24 05 30 03", ""; Input6 = 8, 0, 0x0001, "Status, Flow, Setpoint, Override and Valve", 6, "20 04 24 06 30 03", ""; Input7 = 1, 0, 0x0001, "Status", 6, "20 04 24 09 30 03", ""; Input8 = 8, 0, 0x0001, "Exception Detail Alarm", 6, "20 04 24 0A 30 03", ""; Input9 = 8, 0, 0x0001, "Exception Detail Warning", 6, "20 04 24 0B 30 03", ""; Input10 = 15, 0, 0x0001, "Exception Detail Alarm and Exception Detail Warning", 6, "20 04 24 0C 30 03", ""; Input11 = 4, 0, 0x0001, "FP-Flow", 6, "20 04 24 0D 30 03", ""; Input12 = 5, 0, 0x0001, "Status and FP-Flow", 6, "20 04 24 0E 30 03", ""; Input13 = 9, 0, 0x0001, "Status, FP-Flow and FP-Valve", 6, "20 04 24 0F 30 03", ""; Input14 = 9, 0, 0x0001, "Status, FP-Flow and FP-Setpoint", 6, "20 04 24 10 30 03", ""; Input15 = 13, 0, 0x0001, "Status, FP-Flow, FP-Setpoint and FP-Valve", 6, "20 04 24 11 30 03", ""; Input16 = 14, 0, 0x0001, "Status, FP-Flow, FP-Setpoint, Override and FP-Flow", 6, "20 04 24 12 30 03", ""; Output1 = 2, 0, 0x0001, "Setpoint", 6, "20 04 24 07 30 03", "HORIBA STEC's Default Output"; Output2 = 3, 0, 0x0001, "Override and Setpoint", 6, "20 04 24 08 30 03", ""; Output3 = 4, 0, 0x0001, "FP-Setpoint", 6, "20 04 24 13 30 03", ""; Output4 = 5, 0, 0x0001, "Override and FP-Setpoint", 6, "20 04 24 14 30 03", ""; $ Please contact HORIBA STEC, if you have any questions.