$ EZ-EDS Version 3.27.1.20191218 Generated Electronic Data Sheet [File] DescText = "HORIBA STEC Mass Flow Module EDS File"; CreateDate = 03-23-2020; CreateTime = 11:09:03; ModDate = 03-23-2020; ModTime = 11:09:03; Revision = 1.1; [Device] VendCode = 162; VendName = "HORIBA STEC, Co., Ltd."; ProdType = 39; ProdTypeStr = "Mass Flow Controller, Enhanced"; ProdCode = 50; MajRev = 1; MinRev = 1; ProdName = "SEC-Z704S"; Catalog = "N/A"; [IO_Info] Default = 0x0001; PollInfo = 0x0001, 2, 1; Input1 = 2, 0, 0x0001, "Flow", 6, "20 04 24 01 30 03", "Flow"; Input2 = 3, 0, 0x0001, "Status, Flow", 6, "20 04 24 02 30 03", "Status, Flow"; Input3 = 5, 0, 0x0001, "Status, Flow and Valve", 6, "20 04 24 03 30 03", "Status, Flow and Valve"; Input4 = 5, 0, 0x0001, "Status, Flow and Setpoint", 6, "20 04 24 04 30 03", "Status, Flow and Setpoint"; Input5 = 7, 0, 0x0001, "Status, Flow, Setpoint and Valve", 6, "20 04 24 05 30 03", "Status, Flow, Setpoint and Valve"; Input6 = 8, 0, 0x0001, "Status, Flow, Setpoint, Override and Valve", 6, "20 04 24 06 30 03", "Status, Flow, Setpoint, Override and Valve"; Input7 = 4, 0, 0x0001, "FP-Flow", 6, "20 04 24 0D 30 03", "FP-Flow"; Input8 = 5, 0, 0x0001, "Status and FP-Flow", 6, "20 04 24 0E 30 03", "Status and FP-Flow"; Input9 = 9, 0, 0x0001, "Status, FP-Flow and FP-Valve", 6, "20 04 24 0F 30 03", "Status, FP-Flow and FP-Valve"; Input10 = 9, 0, 0x0001, "Status, FP-Flow and FP-Setpoint", 6, "20 04 24 10 30 03", "Status, FP-Flow and FP-Setpoint"; Input11 = 13, 0, 0x0001, "Status, FP-Flow, FP-Setpoint and FP-Valve", 6, "20 04 24 11 30 03", "Status, FP-Flow, FP-Setpoint and FP-Valve"; Input12 = 14, 0, 0x0001, "Status, FP-Flow, FP-Setpoint, Override and FP-Valve", 6, "20 04 24 12 30 03", "Status, FP-Flow, FP-Setpoint, Override and FP-Valve"; Input13 = 7, 0, 0x0001, "Status, Flow, Pressure and Temperature", 6, "20 04 24 15 30 03", "Status, Flow, Pressure and Temperature"; Input14 = 9, 0, 0x0001, "Status, Flow, Valve, Pressure and Temperature", 6, "20 04 24 16 30 03", "Status, Flow, Valve, Pressure and Temperature"; Input15 = 13, 0, 0x0001, "Status, FP-Flow, FP-Pressure and FP-Temperature", 6, "20 04 24 17 30 03", "Status, FP-Flow, FP-Pressure and FP-Temperature"; Input16 = 17, 0, 0x0001, "Status, FP-Flow, FP-Valve, FP-Pressure and FP-Temperature", 6, "20 04 24 18 30 03", "Status, FP-Flow, FP-Valve, FP-Pressure and FP-Temperature"; Output1 = 2, 0, 0x0001, "Setpoint", 6, "20 04 24 07 30 03", "Setpoint"; Output2 = 3, 0, 0x0001, "Override and Setpoint", 6, "20 04 24 08 30 03", "Override and Setpoint"; Output3 = 4, 0, 0x0001, "FP-Setpoint", 6, "20 04 24 13 30 03", "FP-Setpoint"; Output4 = 5, 0, 0x0001, "Override and FP-Setpoint", 6, "20 04 24 14 30 03", "Override and FP-Setpoint"; $ Please contact HORIBA STEC, if you have any questions.