The INFICON Bayard-Alpert Pirani Capacitance Diaphragm Gauge, TripleGauge™ BCG450-SD, combines the advantages of three different technologies in a single, compact, economical package to measure process and base pressure from 5 x 10-10 to 1500 mbar (3.75 x 10-10 to 1125 Torr). The BCG450-SD is designed to take the place of three sensors (hot ion, convection enhanced Pirani and vacuum switch), thus reducing cost and valuable tool space.
- Gas-type independent pressure measurement above 10 Torr provides more reliable control for any gas-mixture
- Pirani interlock protects the hot filament from premature burnout
- Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
- Easy to exchange sensing element with on-board calibration data guarantees reproducibility
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